Improved Thermal Resistance and Electrical Conductivity of a Boron-Doped DLC Film Using RF-PECVD
نویسندگان
چکیده
منابع مشابه
Determining the thin-film thermal conductivity of low temperature PECVD silicon nitride
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ژورنال
عنوان ژورنال: Frontiers in Materials
سال: 2020
ISSN: 2296-8016
DOI: 10.3389/fmats.2020.00201